• Technical Name
  • Fabrication of Micro Structure by Nano 3D Lithography System
  • Operator
  • National Tsing Hua University
  • Booth
  • Online display only
  • Contact
  • 吳佳容
  • Email
  • garfield850825@gmail.com
Technical Description We have successfully built up a stable platform to fabricate 3D micro/nano scale structures based on Two-Photon Polymerization (TPP) technology. With this platform, we can generate arbitrary 3D microstructures with the lateral resolution is about 300 nanometer and axial resolution is about 1200nm. The highest writing speed is about 100um/s. The processing area is about 18mm*18mm.
Scientific Breakthrough Our system has the latest developed path planning software, helping increase the precision of the structures, e.g. compound lens. Moreover, we developed a continuous multi-file stitching method to reduce manual error, monitor and correct laser power for increasing structural yield. By far, aspherical microlens arrays have been successfully fabricated, only with a nanometer-level structural error.
Industrial Applicability Our TPP technology can fabricate many different structures with extraordinary resolution and precision and we can provide arbitrary and rapid prototyping structures. Also, we developed a continuous multi-file automatic stitching method, which can fabricate a large area of structures. Our laboratory is developing the Galvanometer system now, it will make our fabrication speed increase by 100 times