Technical Name The Development of Lead-Free Piezoelectric MEMS Triaxial Accelerometer System for Safety Monitoring of Unmanned Vehicles
Project Operator National Cheng Kung University
Project Host 朱聖緣
"The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials,successfully prepared MEMS lead-free triaxial piezoelectric accelerometers. 

The use of lead-free materials is the world's first development result. In addition, the team also integrated sensors, back-end circuitsuser interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles,successfully integrated the intelligent integrated sensingcontrol system required in the Internet of Things era."
Technical Film
Scientific Breakthrough
Our team has broken through the piezoelectric properties of the existing material ZnOintegrated with the MEMS process. We has successfully developed the world's first MEMS lead-free piezoelectric triaxial accelerometer,continues to integrate the upstream "piezoelectric material synthesisaccelerometer production", midstream "accelerometer circuitmodule design"downstream "user platform system development" to independently develop a set of IoT systems to accelerate the world The sensor field has opened up a new path.
Industrial Applicability
Matching Needs
Keyword MEMS Lead-free Piezoelectric 3-axis accelerometer Low power consumption Environmentally friendly IoT Transimped-ance amplifier SAR ADC ZnO
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