| Technical Description |
\"The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials,successfully prepared MEMS lead-free triaxial piezoelectric accelerometers. The use of lead-free materials is the world＇s first development result. In addition, the team also integrated sensors, back-end circuitsuser interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles,successfully integrated the intelligent integrated sensingcontrol system required in the Internet of Things era.\" |
| Scientific Breakthrough |
Our team has broken through the piezoelectric properties of the existing material ZnOintegrated with the MEMS process. We has successfully developed the world＇s first MEMS lead-free piezoelectric triaxial accelerometer,continues to integrate the upstream \"piezoelectric material synthesisaccelerometer production\", midstream \"accelerometer circuitmodule design\"downstream \"user platform system development\" to independently develop a set of IoT systems to accelerate the world The sensor field has opened up a new path. |
| Industrial Applicability |
考量到全球環保意識抬頭，對於含鉛產品的規範趨於嚴格，像是歐盟的RoHS危害性物質限制法規等，未來含鉛相關產品未來將逐漸淘汰，無鉛產品將成為未來市場主流。本團隊已開發的MEMS無鉛壓電加速規，其擁有體積小、質量輕以及可由晶片異質整合技術與CMOS製程等優點，目前已可應於於無人載具等振動環境感測。 |
