Technical Name Highly Sensitive Two-Dimensional-Materials-Based Gas Sensing Chip
Project Operator National Tsing Hua University
Project Host 闕郁倫
Our plasma-assisted selenization technology enables adjustable parameters for different gases. With low-temperature processing and large-area fabrication, it ensures consistent sensor performance. By controlling the selenization process, we can modify material properties to meet specific app
lication needs. This technology advances gas sensor research, offering high-performance sensors for environmental, safety, and medical gas detection and monitoring.
Scientific Breakthrough
We have successfully applied the plasma-assisted selenization technologyto the fabrication process of 4 and 8-inch wafers, realizing large-scale production. On 4-inch wafers, even with a yield of only 40-50%, the cost remains below 20NTD. On 8-inch wafers, it is estimated that the yield can reach80%, with a cost of less than 5NTD per wafer. By achieving large-area fabrication, enhancing sensitivity and selectivity, we can realize higher-performance gas sensors.
Industrial Applicability
2D materials have unique selenization technology in gas sensor research. In addition to being used for air quality detection of NOx, it can be expanded to other industries such as industrial gas detection of NH3, H2S, indoorair quality detection of HCHO and CO, and in the automotive field for detecting carbon CO and ethanol. In the wearable field, the detection of bodyhealth indicator gases such as carbon monoxide, acetone, ammonia, and ethanol are possible.
Keyword Next Generation Gas Sensor 2D material Transition metal dichalcogenide(TMDC) Gas Sensor Resisting Gas Sensor Wearable Device AQI
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