This project, "CMOS-compatible Quantum Processor with silicon-based Spin Qubits and Cryo-CMOS Integrated System," aims to advance quantum technology by leveraging manufacturing and design technologies established within Taiwan's semiconductor industry. The project focuses on CMOS-compatible spin qubits as its core technology and seeks to develop the peripheral cryogenic CMOS system as an integrated system. Spin qubits offer long coherence times and compatibility with existing manufacturing processes. The key goals include integrating these qubits with cryogenic CMOS circuits in an integrated design. Our team will utilize isotope-purified silicon (28Si) to enhance performance and optimize FinFET and Ge/SiGe heterostructures for qubit fabrica

A CMOS-compatible fabrication platform on 8-inch Si substrates was employed to realize FinFET-based qubit structures. Leveraging SiGe/Ge quantum dots, coherent spin qubit control was successfully demonstrated in Taiwan for the first time. Furthermore, a miniaturized CMOS low-noise amplifier was developed, achieving a noise temperature of 2.2 K with a compact footprint of 0.018 mm², representing one of the best reported performances to date.

Quantum computing, a rapidly advancing frontier pursued by leading technological nations, holds the potential to address problems intractable for classical supercomputers, including large-number factorization, molecular orbital calculations, optimal portfolio design, and many-body quantum system simulations. This work, grounded in Taiwan’s robust semiconductor industry, advances miniaturized and integrated spin-based quantum computing core technologies to overcome key bottlenecks in scaling universal quantum processors. The results highlight promising prospects for realizing large-scale quantum computing systems based on semiconductor technologies with significant industrial relevance.