| Technical Name |
Multi-Point Active Optical Element |
| Project Operator |
National Synchrotron Radiation Research Center |
| Project Host |
傅皇文 |
| Summary |
The 25-point bender developed by NSRRC enables high-precision control of mirror surface profiles, actively optimizing beam quality and focusing performance from the EUV to soft X-ray regime. This technology enhances measurement sensitivity and stability, supporting advanced beamlines and accelerating research in semiconductors, quantum materials, and emerging energy technologies. |
| Scientific Breakthrough |
The 25-point bender developed by NSRRC introduces a high-degree-of-freedom adaptive optics platform for EUV and soft X-ray applications. By enabling precise control of mirror surface profiles, it actively optimizes beam focusing and wavefront quality, overcoming the limitations of conventional fixed optics. This innovation enhances beamline performance, measurement precision, and experimental flexibility for next-generation synchrotron research. |
| Industrial Applicability |
This technology enhances beam quality and focusing performance in the EUV to soft X-ray regime, enabling applications in semiconductor inspection, advanced materials characterization, and quantum device development. By improving measurement precision and experimental efficiency, it accelerates R&D processes and strengthens the capabilities of synchrotron beamlines for scientific and industrial innovation. |