Technical Name Development of Piezoelectric MEMS Scanning Mirror for Autonomous Vehicles (AVs)Augmented Reality (AR) applications
Project Operator National Tsing Hua University
Project Host 方維倫
Summary
(1) Component (Design): It achieves high-performance microscanning mirrors with innovative designs that meet automotiveconsumer electronics requirements.

(2) Process (Platform): The team collaborates with wafer foundries to establish a database of piezoelectric parameters through their MEMS development expertise, enabling mass production of chips.

(3) Applications (Opto-mechanical modularization): Customized designs are implemented for LiDARHUD according to specific requirements.
Scientific Breakthrough
(1) Mirror size (LiDAR): With a mirror diameter of 3 mm, the scanning angle can reach 140 degrees.(2) Operating frequency (Display): At a driving frequency of 37 kHz, the scanning angle can still reach 70 degrees.(3) Scanning angle (LiDAR / Display): Achieving a scanning angle of 180 degrees without the need for vacuum packaging. (The world's first)(4) Operating mode (Display): Capable of projecting nearly vertical pattern boundaries in dual-axis imaging.
Industrial Applicability
(1) Automotive industry: Self-driving car LiDAR systems, head-up displays (compliant with industry standards).(2) Consumer electronics: Head-mounted display, smart glasses, mini projectors (compliant with industry standards).(3) Unmanned factories: Robotic arms, intelligent transportation systems.(4) Emergingforward-looking areas: Minimally invasive surgery, quantum computer.
Keyword Micro scanning mirror MEMS (Micro-Electro-Mechanical Systems) Piezoelectric actuator Light Detection And Ranging (LiDAR) Head-up display (HUD) Head-mounted display (HMD) Smart glasses Piezoelectric process platform Autonomous vehicles (AVs) Augmented reality (AR)
Notes
  • Contact
  • Yuanyuan Huang
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