| Technical Name | Low Temperature Supercritical Fluid Treatment Technique with Electronic Devices | ||
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| Project Operator | National Sun Yat-Sen University | ||
| Project Host | 張鼎張 | ||
| Summary | Our team has established a novel semiconductor manufacturing technology－supercritical fluid treatment technology. Supercritical fluid treatment technology could dramatically improve performances of electronic devices including, fin field-effect transistor (FinFET), deep UV light-emitting diode (UVC LED), high-frequency/high-power transistors, solar cell, resistive random access memory (RRAM), gas |
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| Scientific Breakthrough | - |
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| Industrial Applicability | - |
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| Keyword | |||
- futuretech.most@gmail.com
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