Technical Name Low Temperature Supercritical Fluid Treatment Technique with Electronic Devices
Operator National Sun Yat-Sen University
Booth Online display only
Technical Description Our team has established a novel semiconductor manufacturing technology-supercritical fluid treatment technology. Supercritical fluid treatment technology could dramatically improve performances of electronic devices including, fin field-effect transistor (FinFET), deep UV light-emitting diode (UVC LED), high-frequency/high-power transistors, solar cell, resistive random access memory (RRAM), gas
Scientific Breakthrough -
Industrial Applicability -
Contact 姜孝承
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