| Technical Name | Advanced high-range measuring platform for wafer inspection | ||
|---|---|---|---|
| Project Operator | National Taiwan University | ||
| Project Host | 陳亮嘉 | ||
| Summary | The advanced high-accuracy measuring platform is integrated by precision metrology, nano-position control techniqueCAD. To inspect the 12 inch wafer, the measuring range of the platform is 300mm×300mm×5mm. The long traveling range with nano scale resolution is a original technique in Taiwan. Due to the high expensebulky size of commercially laser interferometer, we developed a miniaturiz |
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| Scientific Breakthrough | - |
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| Industrial Applicability | - |
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| Keyword | |||
| Notes | |||
- Contact
- futuretech.most@gmail.com
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