Technical Name SOLUTION PROPERTY SENSOR AND METHOD OF FABRICATING
Project Operator National Sun Yat-sen University
Project Host
Summary
The intelligent multi-sensing system has a pH range of pH3 - pH13, a temperature sensing resistance change of about 2 Ω / oC, and a conductivity part, which can clearly distinguish different water quality electrical conductivities. In terms of process stability, 20 different sensing wafers were simultaneously fabricated for measurement, and the wafer variation was less than 7%. Based on the above results, it is verified that the multi-sensing chip has good stability, and can be applied to different water bodies in the future and widely installed in different water areas combined with cloud monitoring systems to provide a set of intelligent detection methods.
Scientific Breakthrough
Traditionally, pH testing is mainly based on glass electrodes and pH test paper types. However, large volume, difficulty in preservation, long reaction time and error in visual judgment are the main problems for traditional measurement. The latter developed a high-stability and portable pH measuring device based on the principle of ion field-effect transistor pH measurement. However, due to the measurement of such a device, these chips are easily damaged by erosion, and the semiconductor process is used to produce these kinds of chips. The costing process is high, and the cost per replacement is higher than that of the glass electrode. Therefore, the follow-up research has developed to extend the field effect transistor gate to connect the sensing film. When measuring, it only needs to touch the film and the solution. When replacing, it only needs to replace the sensing chip part, which greatly reduces the damage rate of the sensing chip and the cost of the production.
We combine pH, temperature and electrical conductivity on the same chip, and the developed measurement circuit successfully developed a highly stable multi-sensor. The pH part mainly utilizes the extended ion field effect transistor as the measurement principle and combines industrial production to produce a highly stable indium tin oxide touch film. Different sensing patterns are cut on the film by rapid laser processing. Conductivity and temperature are measured by measuring the properties of the film pattern and determining the temperature resistance. Finally, we use the circuit to connect with Bluetooth® and measure different pH, temperature and conductivity value in the different solution successfully developed a rapidly multi-sensor. The results of this sensor show wide detection range, rapid measurement, easy storage, low cost of sensing materials, miniaturization and simple operation, and also with a high advantage for long-term water quality monitoring using simple operation. With the combination of network systems, monitoring personnel can easily find out the problem in time and deal with it immediately. This technology can save manpower and material costs in the future.
Industrial Applicability
穿戴式智能衣、分散式養殖池、野溪偵測、長照機構監控、智慧馬桶居家量測、嬰兒尿濕及尿液偵測、VR眼罩整合。
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