Technical Name Miniature Gas Sensor and Method for Manufacturing the Same
Project Operator National Applied Research Laboratories
Project Host
1.Microelectromechanical technology (miniature): sensing wafer shrinkage to pinhole size, microheating zone only one hair width.
2.Low-stress film and micro-heater technology (fast heating): heating to 320 °C in milliseconds (ms).
3.Nano technology (power saving): Improve the sensitivity of the reaction to make the components lower energy.
Scientific Breakthrough
The invention relates to a composite layer low-concentration gas detector, comprising: a gas detector wafer, the multilayer film sensing material has a hollow structure on the back, an insulating layer under the sensing material, and a micro heating around the sensing material. The sensing material is attached to the sensing electrode, and the film sensing material is a composite oxide semiconductor-based sensing film; a composite oxide semiconductor semiconductor has a thickness of 0.1~2 um, and can be added with a nano metal (1-500 nm). Catalyzed on the surface of the oxide semiconductor layer, the reaction layer is a concave-convex surface, the insulating layer is a low-stress insulating film, and the electrode is shape-changeable; through the low-concentration gas detector structure created by the invention, the micro-electromechanical device is provided on the germanium substrate (MEMS) structure and integrated into the wearable device. Expected availability and products, primarily in conjunction with IoT sensor applications. Market Analysis Domestic and foreign targets for CO or CO2 sensors are electrochemically or optically performed with high volume and energy requirements. This study uses MEMS technology combined with composite structure to achieve the best results for miniaturization and power saving. Under the condition of 180 mW, the sensitivity of the resistive miniature carbon dioxide gas sensor is 26.58 at 2400 ppm gas concentration. %. We also calibrated with the German commercial Testo CO2 gas sensor to get a close match. In addition, with the addition of nano gold, the measurement of the CO concentration can be measured to 10 ppm level components have been completed, in line with indoor air quality standards, but the gas sample calibration and measurements have been completed. In the integration of the gas sensing component and the Internet of Things sensor, the gas concentration of the gas sensing component can be directly uploaded to the network through the Internet of Things module, and the result is displayed by the mobile APP and displayed when the indoor air quality is When the legal standard is exceeded, the APP will give the warning to the user.
Industrial Applicability
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