The long trace profiler (LTP) can be used to measure the figureintermediate frequency roughness of an X-ray mirror. The measurement process is accurate, high-speednon-contact. The radius of curvature for the measurement may be ranged from a value from 5 m to infinity, such that the surface profile feature can be measured in the range with a longitudinal resolution of 0.15 nm.

A large-scale X-ray mirror measurement was carried out on an active spectrometeran active spectrograph for TPS 41A1 of Taiwan Photon Source to observe the variation with a raise of 10 nm for active grating after heating. The slope error of the grating mirror after being heated is corrected instantly on beamlines, so that there can be a 25,000 of resolving power for a photon energy of 510 eV.

Optical measurementdesign capabilities of NSRRCmanufacturing capacity of domestic vendors are integrated, as well as technical applications of domestic vendors are developeda variety of customizedhigh-value X-ray optical products are designed & developedfabricated domestically, which, for example, can be used to measure mirror fabricationinstallation result.