| Technical Name | Intelligent E-nose with Joule Self-heating Nanodevice Array | ||
|---|---|---|---|
| Project Operator | National Chiao Tung University | ||
| Project Host | 李遠鵬 | ||
| Summary | The core technology provides the selective deposition of metalsmetal oxide semiconductors in n- (or p-) region of (n+/n-/n+p+/p-/p+) nanoelectronic device via localized Joule heat in a plasma assisted chemical deposition system. This invention solves the complex process steps previously required for the selective deposition of sensing materials on the surface individual nanoelectronic dev |
||
| Scientific Breakthrough | - |
||
| Industrial Applicability | - |
||
| Keyword | |||
- futuretech.most@gmail.com
other people also saw