• Technical Name
  • Smart Nitric Oxide Gas Sensor of High-Temperature Resistance
  • Operator
  • National Chiao Tung University
  • Booth
  • Online display only
  • Contact
  • 趙柏翔
  • Email
  • z0983@nctu.edu.tw
Technical Description This technology uses a MOCVD system to grow a spinel thin-film on a sapphire substrate. The process of manufacturing this sensing film is capable for mass-produced. The research found that the gas sensor made of spinel thin-film only has excellent response and high selectivity for NO gas. With proper electrode design the resistance measured by this electrode will change. Combined with the reading signal of the circuit, the measured signal can be transmitted to the cloud by 4G network. Even in a harsh environment, the signal can be received at a safe place. In addition, this technology also proposes to produce the heater on the same plane of the sensor with the insulation packaging. The heater can instantly heat the sensor to 300°C, which contributes to improve the sensing ability of the gas sensor. Compared with the traditional gas sensor with a micro-electromechanical suspended diaphragm, this design will have a simpler manufacturing process and a more robust mechanical structure.
Scientific Breakthrough The design of this sensor places the heater and the sensing element on the same plane, which strengthens the strength of the structure. Especially rare, this sensing material can work normally in a very high temperature environment.
Developing in a special film with a spindle-shaped structure, and this film only responds to NO due to the surface bonding energy characteristics. Today's metal oxides have no similar measurement capabilities. When NO is adsorbed, the resistance of this film will have an increasing, the sensitivity can be as low as ppb sensing level. This sensor uses epitaxial growth of ZGO spinel films by a mass-producible MOCVD system. There are Zn and Ga suspension bonds on the surface, which have excellent adsorption capacity for NO.
Industrial Applicability In recent years, IoT and air pollution issues have received much attention. However the previous air pollution detection instruments are not only bulky but also expensive. Therefore, developing a new detection device is imperative. This sensor is highlighted with both portable and high-temperature resistant, which might be suitable for using in Internet of Vehicle technologies in the future.